AttoFab
Open-source semiconductor process simulator
An education-first fabrication simulator built on classical, citable textbook physics: thermal oxidation (Deal-Grove, with (111)/(100) orientation dependence), Gaussian ion implantation, Fick's-law diffusion, LOCOS-style masked oxidation, mask expose/develop, and cellular-automaton anisotropic and isotropic etch/deposition. The 1D and 2D engines are complete; a hand-rolled GDSII parser and 3D wafer mesh work, with integration still partial. Ships with a physics-regression bench, a FastAPI backend, two web frontends and a CLI.
Scope & limitations Lithography is limited to mask expose/develop; 3D lithography is not implemented. Oxidation substitutes material in place rather than modelling volume expansion, so oxide growth alone creates no topography - only etch does. The Pearson-IV implant model is gated off until its moment-matching is correct, and some 3D flows still run only through a Rust example.
github.com/LKSH-GNDJ/AttoFab